SAES Pure Gas Palladium Hydrogen Purifiers produce the purest hydrogen on the planet.  The patented Micro-Channel design offer the most significant innovation in hydrogen gas purification in over 20 years. The advanced Hydrogen purifier offers higher flow capacity with lower cost and improved durability for high-volume manufacturing processes. SAES Pure Gas Hydrogen purifiers deliver 9N’s (99.9999999%) purity with typical levels.

The PS7-PD1 includes one Palladium cell in a compact enclosure for a wide range of flows for point-of-use purification for single process tools or bulk gas supply for many process tools at large LED and semiconductor fabs. A single Palladium cell purifiers the entire inlet Hydrogen flow.  The enclosure is suited for installation near the process tools or in a bulk gas room.


• Ultra-pure hydrogen from any source
• < 99.9999999% purity; < 1 ppb total impurities
• Patented palladium micro-channel technology
• High flow capacity up to 1,085 slpm (70 Nm3/hr.)
• Lowest power consumption
• Smallest footprint
• Nitrogen purge system
• 5.0″ Color touchscreen HMI with PLC


Hydrogen Purifier


Advantages of Palladium:
• Only hydrogen passes through to the pure side – the purest gas
• Every impurity is removed – no exceptions
• Unlimited lifetime – non-consumable technology
• Separates pure H2 from source gas with ppm or % level impurities
• Easy to verify performance with in-situ helium leak test


• GaN epitaxy
• Silicon carbide (SiC) epitaxy
• Photovoltaics
• Polysilicon production
• Semiconductor
• Fiber optic processes
• Fuel cells

Model: PS7-PD1-05

48slpm, 2.9 Nm3/hr

Model: PS7-PD1-10

96slpm, 5.8Nm3/hr

Model: PS7-PD1-15

145slpm, 8.7Nm3/hr

Model: PS7-PD1-20

193slpm, 11.6Nm3/hr

Model: PS7-PD1-25

241slpm, 14.5Nm3/hr

Model: PS7-PD1-30

290slpm, 17.4Nm3/hr

Model: PS7-PD1-35

338slpm, 20.3Nm3/hr

Model: PS7-PD1-40

386slpm, 23.2Nm3/hr

Model: PS7-PD1-45

435slpm, 26.1Nm3/hr

Model: PS7-PD1-50

483slpm, 29.0Nm3/hr

Model: PS7-PD1-55

531slpm, 31.9Nm3/hr

Model: PS7-PD1-60

580slpm, 34.8Nm3/hr

Model: PS7-PD1-65

628slpm, 37.7Nm3/hr

Model: PS7-PD1-70

676slpm, 40.6Nm3/hr


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